Acoustic wave microsenser array for tactile sensing applications

The piezoelectric ultrasound impedance sensing technique uses the relationship between electrical impedance of the piezoelectric resonator and surface loads. In this project, the face-shear mode relaxor-PT resonator arrays based on impedance sensing are studied for tactile sensor applications. Initial study shows that significantly enhanced sensitivity can be obtained from the face-shear mode sensors.

AW3

 

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References:

  1. Kim, K., S. Zhang, and X.N. Jiang, “Surface Load Induced Electrical Impedance Shift in Relaxor-PbTiO3 Crystal Piezoelectric Resonators”, Appl. Phys. Lett. 100, 253501 (2012);
  2. Kim, K., S. Zhang, and X.N. Jiang, “Surface Acoustic Load Sensing Using a Face-Shear PIN-PMN-PT Single Crystal Resonator”, IEEE Trans. Ultrason. Ferroelectr. Freq. Contr. Vol. 59, pp. 2548-2554 (2012).

COPYRIGHT© 2012 XIAONING JIANG.
MAE, NCSU, RALEIGH, NC